Developing a Si Micromachined Module for a 2 THz Schottky Receiver

Space instruments to perform measurements in the THz range can provide unique insight into the chemical and physical processes in space, motivating the need to develop key technology components to support this frequency domain. Development of a 2.06 THz receiver, used for the purposes of detecting the ionized oxygen (OI) line, is detailed here, including the process of its design, fabrication, and integration with an advanced local oscillator (LO) chain to support subharmonic mixing.