Silicon Microring Modulator for High SFDR Analog Links in Monolithic 45nm CMOS

We characterize the linearity of a lateral junction microring modulator in a monolithic 45 nm CMOS platform versus modulator bias, optical wavelength, and input power, and achieve peak third-order SFDR of 96.4dB · ${\text{H}}{{\text{z}}^{\frac{2}{3}}}$ at 0dBm laser power.