Monolithically Integrated High-Order Vernier Filters and Tuning Circuits for Electronic-Photonic Quantum System-on-Chip

We demonstrate a monolithically integrated 6
^th
-order filter, w ith h eater driver circuits implemented alongside photonics in a zero-change 45 nm CMOS platform, achieving <1 dB drop loss and >80 dB on-chip pump power suppression.