Research on Incremental Adaptive Fuzzy PID Algorithm for Permanent Magnet Synchronous Motor System

Permanent magnet synchronous motor has the characteristics of high reliability and high efficiency, so it is widely used in XY motion platform in IC packaging equipment. Therefore, this paper selects the permanent magnet synchronous motor control system as the research object. For conventional PID, it is difficult to ensure the optimal control effect of conventional PID control for complex systems with large lag, time-varying, high coupling and nonlinearity. Therefore, a method based on three-loop PID control is designed, which uses feedforward + incremental adaptive fuzzy PID composite controller to perform online self-tuning of the parameters of the position regulator. At the same time, for the disadvantage that the initial parameters of fuzzy PID are not easy to tune, an improved genetic algorithm is proposed for online optimization. And use the Simulink and Fuzzy toolbox of MATLAB software for simulation, the final results show that compared with the conventional PID control, the improved controller design well meets the precision requirements of the mobile platform on IC packaging equipment, and the response speed is faster, the overshoot is smaller, the system execution efficiency is also greatly improved. This is particularly important for the development of semiconductor industry and the improvement of semiconductor packaging equipment.