Experimental Study of Nano-Structural Coatings Formed by Microwave Plasma

A novel microwave plasma (MP) torch on a rectangular waveguide with two magnetron sources 2.45 GHz and an experimental setup are designed to perform hydroxyapatite (HA) coatings on metallic and dielectric substrates. Operating regimes of a such torch are investigated. Experimental studies have proved the advantages of this method of HA coating in comparison with analogous techniques. The proposed design is suitable for application in other technologies of different materials processing. Results obtained in the present study help to better understand the processes of nano-structural layer formation on solid substrates.