Simulation of Piezoelectric Disc & Micromachined Ultrasound Transducer

The paper reports simulation of piezoelectric disc and its extension to understand pMUT operation. The theoretical formulation matches the simulation results for piezo disc and pMUT at fundamental mode of vibration within 5% of each other. Stress formation in layers, central displacement, pressure output at 3mm distance for both PZT and AlN (Aluminium Nitride) as the piezo layer in pMUT are captured via the simulation model and compared.