A Reconfigurable SAW Resonator Using Monolithically Integrated Switches

This paper presents design, implementation, and measurement results for a reconfigurable surface acoustic wave (SAW) resonator using monolithically integrated vanadium dioxide (VO2) switches. The frequency of the resonator is tuned between two different states from 700 MHz to 720 MHz while the resonator maintains a quality factor better than 350 over the tuning range. The use of vanadium dioxide switches, which are only a few tens of micrometers in size, allows the monolithic integration with the SAW resonator. This enables the practical implementation of a reconfigurable SAW resonator, for the first time, without any major performance degradation or increase in the size of the resonator. The proposed resonator structure can be utilized to develop compact tunable SAW filters for wireless applications.