Accumulative Mill Rolled Pd Foil based H2 Getter for Improving Microwave Device Reliability

Pd is used industrially as a catalyst for hydrogenation reactions and exhaust gas cleaning due to its high hydrogen solubility. When using a bulk Pd as a getter for outgassed H
2
removal from an electronic package however, the bulk Pd material may lose ductility, toughness, mechanical strength and plastic deformation even at
$\text{PdH}(x\leq 0.58)$
, which greatly limit maximum H
2
absorption capacity as a getter material. With X-ray diffraction analysis and manometry measurements, this paper will show that an accumulative mill rolling process could turn a bulk Pd material into a desirable getter material for scavenging outgassed H
2
from various microelectronic packages and microwave devices.