Effect of TAZ as an Inhibitor on Electrochemical and CMP Characteristics of Molybdenum

The effect of 1, 2, 4 – trizazole (TAZ) on CMP and electrochemical of Mo is investigated. It is found that removal rate (RR) decrease with the addition of TAZ into the alkaline H
2
O
2
-based slurry. The potentiodynamic polarization experiment shows that after adding TAZ into the slurry, the anti-corrosion ability of Mo increases. The mechanism of TAZ to CMP of Mo is probably due to TAZ adsorbs on the Mo surface.