Shear-Horizontal Surface Acoustic Wave on Ca3TaGa3Si2O14 Piezoelectric Single Crystal

SummaryIn this study, the propagation and resonance properties of shear-horizontal surface acoustic waves (SH SAWs) on a rotated Y-cut 90°X propagating Ca
3
TaGa
3
Si
2
O
14
(CTGS) with a Au- or Al-interdigital transducer (IDT) were investigated theoretically and experimentally. It was found that not only a high-density Au-IDT but also a conventional Al-IDT enables the energy trapping of SH SAW in the vicinity of the surface. For both IDTs, the effective electromechanical coupling factor of about 1.2% and the zero temperature coefficient of frequency can be simultaneously obtained by adjusting the cut angle of CTGS and the electrode film thickness.