Monolithic Multiwavelength VCSEL Array Using Cavity Patterning

We report on a novel approach to adjust the emission wavelength of VCSEL devices. By patterning the Fabry-Perot cavity, we can control the effective refractive index of the optical mode and thus adjust the resonant wavelength. We developed a fabrication process based on 2 steps epitaxy and a lithographic cavity patterning to define the emission wavelength at the emitter level. A multiwavelength VCSEL array with a 30 nm wavelength tuning range around 940 nm is demonstrated.