Dielectrically Modulated both-side cavited SOI-MOSFET based Bio-sensor highly sensitive for glucose oxidase

We propose an SOI-MOSFET-based bio-sensor with cavities on both sides, i.e., source and drain, in this paper. The sensitivity of a bio-sensor is evaluated by looking at the change in threshold voltage and drain current that occurs when bio-molecules are introduced. The cavities etched under the gate oxide are of one symmetrical and two asymmetrical types. The asymmetrical topology having 50nm source side and 20nm drain side cavity exhibits higher threshold voltage and drain current sensitivity for glucose oxidase. Glucose oxidase is an enzyme which is synthesized by interaction of species like fungi and micro insects. It helps in detection of glucose and could also be used for detection of diabetes and Alzheimer disease. The sensitivity of this device is also tested for different filled factors such 50%, 75% and 100% and it is observed the sensitivity for fill factor below 100% is very low. The device design and simulation results for different variations are obtained by using Silvaco TCAD simulator.