A hybrid Silicon-On-Glass (SOG) lateral micro-accelerometer with CMOS readout circuitry

A hybrid micro-accelerometer system consisting of a new bulk Silicon-On-Glass (SOG) lateral capacitive micro-accelerometer and a CMOS interface circuit is presented. The accelerometer has a 120 /spl mu/m-thick proof mass, 2.2 mm /spl times/ 3.0 mm in size with a 3.2 /spl mu/m sensing gap defined by DRIE. The circuit has a 95 dB dynamic range, a low offset of 370 /spl mu/V and can resolve better than 75 aF. The hybrid system has a measured sensitivity of 40 mV/g and resolution of 100 /spl mu/g//spl radic/(Hz).