160 /spl times/ 120 pixels optically readable bimaterial infrared detector

We have been studying the "Optically Readable Bimaterial Infrared Detector" based on surface micro-machining wafer process technology to realize an inexpensive infrared camera. This paper reports that we have developed a detector by incorporating the new "Cancel Structure" and we have successfully obtained an infrared image without a thermo-electric (TE) cooler.