Biocompatibility of Integrated Nanostructure for IC Electronics Devices

The contact between integrated microelectronics circuits and cellular membrane represented a great issue which research tried to solve in the last years. This achievement could open a huge field of device and systems, bringing the sensitivity and intelligence of microelectronics toward the biological systems. We describe an innovative approach to gain the electric sensing of the membrane by covering the chip contact surface with a carpet of nanowires, in particular silicon and zinc oxide nanowires. Both material ensures low invasiveness toward the biological samples. The nanowires growth is with ICs, allowing on-site amplification of bioelectric signals. We report our preliminary results showing biocompatibility and neutrality of silicon and zinc oxide nanowires used as seeding substrate for cells in culture.