Femtosecond Laser-Induced Periodic Surface Structuring of Metal and Semiconductor Nitrides

Highly regular thermochemical laser-induced periodic surface structures (TLIPSS) were produced on the surface of TiN, CrN and Ge
3
N
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glass-supported thin films using femtosecond IR- and visible-range laser pulses. Systematic studies of the TLIPSS morphology variation as a function of key laser processing parameters and ambient atmosphere revealed the processing regimes providing high-regular 2D and 3D morphologies promising for optical and optoelectronic applications.