Structural Design and Analysis of MEMS Comb Drive Capacitive Accelerometer for Seismic Earthquake Early Warning

This research aims to design a Micro-Electro-Mechanical Systems (MEMS) based enhanced sensitive capacitive accelerometer specifically suited for seismological applications. It discusses the design and simulation of a MEMS-based accelerometer for seismology. It is demonstrated that a complete seismometer can be built using only one MEMS chip as the main component. Recent research in seismology with calibration signals revealed that MEMS-based sensors could lead to a drastic increase in sensitivity. Thus, this MEMS-based sensor canbe implemented as an early warning and detection system. The sensor can register the milder primary jolt and alert people about the more devastating second wave. Since earthquakes are highly unpredictable, this warning system can help to save many lives.