Design of a PZT based cantilever structure

A PZT-based cantilever structure for microphone and microspeaker applications is designed using a multimorph model. The use of zirconate titanate (PZT) greatly improves the characteristics of the microphone and microspeaker. The sensitivity and the sound pressure level (SPL) of the integrated microphone and microspeaker are calculated. It is found that the sensitivity of the microphone and the SPL of the microspeaker are higher than those using normal piezoelectric materials.