Design and optimization of a Vibrational MEMS-Based Energy Harvester

This paper describes the design of a Vibrational Energy Harvester (VEH) based on a microelectromechanical system (MEMS) with gap-closing electrostatic resonator. The electrical signal generated by the MEMS is rectified with a charge pump circuit based on the Greinacher Voltage Doubler (GVD). The performance of the VEH system is analyzed and an optimal resistive load is calculated to maximize harvested power and frequency range of operation. The rectifier was designed in a 0. 18μm technology. The VEH system was validated with Cadence Virtuoso. The designed energy harvester generates a DC output power of 90. 06nW at 9. 95V under an applied vibration with an acceleration amplitude of $0.33\mathrm{m}/\mathrm{s}^{\wedge}2$ at a frequency of 53Hz.