A System-Level Synthetical Modeling Method for Lissajous Frequency-Modulated Mems Gyroscope

Lissajous frequency modulated (LFM) gyroscope ensures the scale factor stability and high performance without trade-off between sensitivity and bandwidth compared with traditional amplitude modulated (AM) gyroscope. This paper proposes an effective system-level synthetical modeling method for LFM gyroscopes. Firstly, the finite element (FE) method has been adopted to obtain the reduced order dynamic model. Then, the circuit model is synthetic in SIMULINK with dynamic model. Finally, a frequency demodulation algorithm is applied to estimate the frequency of output signal, and the estimation errors with different signal-to-noise ratio (SNR) have been obtained. The guidance for mechanical structure manufacture and circuit design can be obtained by our system-level synthetical model.