Micro electric-field sensor based on converse piezoelectric effect

The measurement of electric field has important value for power grid information measurement, equipment fault diagnosis, meteorological monitoring, etc. Meanwhile, electric field measurement can also be used for voltage measurement. Traditional electric field measurement methods, such as field mills, are bulky and costly, and will cause electric field distortion. Micro electric field sensors have advantages of low cost, small size and easy mass production. At the same time, miniature sensors can reduce electric field distortion. Therefore, micro electric field sensors can be used in the applications such as large-scale sensing arrays, internal measurement of equipment, etc. In this paper, we proposed a novel micro electric field sensor based on PVDF film and piezoresistive effect. The proposed sensor has the advantages of wide frequency bandwidth and wide measuring range. Through micro-fabrication, the sensor can be mass produced.