Impact of Annealing Temperature on Optical Properties of CeO2 Thin Films Deposition by Spin Coating Technique

Cerium oxide (CeO2) bulk and thin films, it has been one of the most important oxide materials. CeO2 films deposited by spin coating technique on a glass substrate. The films were annealed with different annealing temperatures. XRD diffraction used to reveal patterns of CeO2 thin films, it shows FCC cubic structure with preferred orientation (220) plane. Scanning electronic microscopy (SEM) exhibited a smooth uniformed surface. The films were had a good adhesion with the substrate with no cracks or holes were observed. Because of the intense near bandgap emission and a broad luminescence in the PL spectra caused by Ce and O vacancies, as well as structural defects, deep level impurities, and amorphous phases. The relative intensity between the distinct peaks of the bands associated with flaws or contaminants was investigated as a technique for film quality control.