Thermoelectric micro modules for spot cooling of high density heat sources

The paper represents further progress in the development of short-legged thermoelectric (TE) micro modules for cooling high power density electronic components. Theoretical analysis and experimental study are conducted to define an available temperature lowering and maximum heat flux densities for short-legged coolers with different kinds of substrates. Temperature differences exceeding 70 K are obtained with TE leg lengths down to 0.2 mm. A new series of micro modules with TE legs 0.2 and 0.3 mm long is developed with an aluminum nitride ceramic.