High-fill-factor, burst-frame-rate charge-coupled device

A 512/spl times/512-element, multi-frame charge-coupled device (CCD) has been developed for collecting four sequential image frames at megahertz rates. To operate at fast frame rates with high sensitivity, the imager uses an electronic shutter technology developed for back-illuminated CCDs. The megahertz frame rates also required metal strapping of the polysilicon gate electrodes. Tested imagers have demonstrated multi-frame capture capability.