Identification of gas species and their concentrations by using sorption kinetics of viscoelastic film

Nanomechanical sensors and their arrays have been attracting significant attention for detecting, distinguishing, and identifying target analytes. In the static mode operation, sensing signals are obtained by a concentration-dependent sorption-induced mechanical stress/strain. Recently, we derived an an-alytical solution, which is applicable to multistep injection-purge cycles in the static mode nanomechanical sensing with viscoelastic receptor layers. The model can be utilized for ex-tracting viscoelastic properties and the concentrations of analytes more accurately by fitting a couple of injection purge curves obtained from experimental data. Here, we show the utility of the optimized parameters directly not only for the identification of gas species but also for their concentrations.