Nanoresonator-based accelerometer with large bandwidth and improved bias stability

Resonant-beam accelerometers based on nanoresonators have demonstrated that reducing the size of the sensing element allows overcoming the sensitivity-bandwidth trade-off [1]. Here we report on an improvement of the performance of such sensors, through an enhancement of the wafer-level packaging (WLP). We perform a study of the different noise sources present in the system, and we show that an improvement of the vacuum level allows overcoming the thermomechanical noise of the proof mass which – so far – limited the previous generation of sensors.