A 100GHz Bandpass Filter Employing Shielded Folded Ridged Quarter-Mode SIW Resonator in CMOS Technology

A miniaturized shielded folded ridged quarter-mode Substrate Integrated Waveguide (FRQMSIW) resonator in 1P6M CMOS technology is presented for millimetre wave applications. By adding a capacitive ridge and folded it inside the resonator, a significant miniaturization is realized. An additional shielded structure is employed to mitigate the leakage from the effective perfect conductor of the conventional quarter-mode SIW cavity. The characteristics of the proposed resonator are investigated first and then employed to design a 100GHz bandpass filter (BPF) with two transmission zeros. Finally, the proposed filter is implemented in 1P6M CMOS technology and measured. The active size of the proposed BPF without pads is
$309 \mu\mathrm{m}\times 275 \mu \mathrm{m}(\sim 0.1 \lambda\times\sim 0.09\ \lambda)$
, and the measured insertion loss (|S
21
|) is 2.06dB.