Effect of Operational-Mode (PI/NPI) and Temperature (> 150°C) on Hysteresis Voltage in Low-Power MEMS Logic Relay

In this paper, the essence of operational-modes (pull-in, PI and non-pull-in, NPI) are examined to adjust the hysteresis voltage (
$V_{H}$
) in tunable-gap micro-mechanical (MEM) devices. Herein, first, an analytical framework is established that clearly validate the concept and several related predictions for the proposal of operation-mode as a design-tool and then experimentally verified. The influence of temperature on switching characteristics is also investigated. We found that for relay operate in PI regime ensure a large
$V_{H}$
(∼2.8 V) at
$\mathrm{T}=300$
°C. The experimental observation helps to prevent the device from stiction (cause by larger hysteresis width), especially for wide temperature range for industries like aerospace or defense electronics application.