A Novel DTSCR With Embedded MOS and Island Diodes for ESD Protection of High-Speed ICs

A novel diode-triggered silicon-controlled rectifier with embedded MOS and island diodes (DTSCR-EMOS-ID) is proposed and investigated. The DTSCR-EMOS-ID was fabricated in 0.18-
$\mu \text{m}$
and 22-nm CMOS processes for verifying the process transplantation. The fabricated DTSCR-EMOS-ID presents a low trigger voltage of 1.3 V, a small turn-on resistance of 8
$\text{m}\Omega /\mu \text{m}$
and a small parasitic capacitance of 43 fF. Meanwhile, the effective failure current and response time of DTSCR-EMOS-ID are optimized to 4.3 A and 3.6 ns, respectively. The DTSCR-EMOS-ID shows much better ESD performance than the conventional LVTSCR and DTSCR fabricated in the same process, which can be attributed to the diode triggering, gate coupling and large injection effects. Moreover, the TCAD simulation results of DTSCR-EMOS-ID agree well with the transmission line pulse testing results, further confirming that the proposed DTSCR-EMOS-ID can be widely used as an effective ESD protection device for high-speed ICs, without the limitation of the fabrication process.