Fin-shape Optimization for Single Diffusion Break Device Performance in FinFET Technology

Single diffusion break (SDB) devices in FinFET technology are desirable and attractive for their minimum footage in aggressively scaled circuits. This paper reports fin-shape optimization efficiently improved SDB PFET device performance by up to 9%. More importantly, it was found that the performance benefit was case-dependent on fin shape. The performance improvement was observed on a straighter fin profile if fin bottom width was lower than a threshold point, while when fin bottom width was larger than the threshold point, fin top/bottom width ratio existed an optimal ratio at 0.54. This was verified and predicted through silicon-validated technology computer-aided design (TCAD) simulation.