Characterizing Scattering Parameters of Superconducting Quantum Integrated Circuits at Milli-Kelvin Temperatures

Designing large-scale superconducting quantum circuits involves complex microwave engineering to minimize loss, spurious reflections, and signal crosstalk. Essential for engineering more complex circuits is precise knowledge of devices’ microwave performance, which can be characterized by measuring its calibrated scattering parameters (S-parameters) at mK temperatures. In this work, we introduce a full 2-port calibrated S-parameter measurement setup which can characterize superconducting quantum integrated circuits and other RF integrated circuits operating at mK temperatures. The design and architecture of the measurement system consisting of in-house developed microwave calibration unit (MCU) housing the newly designed cryogenic calibration standards and the device under test (DUT) is discussed in detail. The measurement setup is then used to demonstrate the first calibrated S-parameter measurements of an in-house developed superconducting qubit integrated circuit at mK temperature.