A Method for Accurately Measuring the Thickness of Plane Medium

A segmented method for measuring the thickness of plane dielectric film in the inner wall of rectangular cavity sensor is put forward based on the principle of dielectric perturbation method and transverse resonance method. The microwave rectangular resonator is applied as the sensor, and it works in TE101 mode in the proposed method. The relationship between the thickness of the resonator film and the resonant frequency is deduced theoretically, and the feasibility of TE101 mode to accurately measure dielectric film is analyzed by simulation. Simulation results show that the proposed method has the advantage of high measuring accuracy. The method can accurately measure the thickness of dielectric films.