Ultra-low loss silicon nitride ring modulator with low power PZT actuation for photonic control

A wafer-scale PZT-actuated ultra-low loss, low-power, stress-optic Si
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ring modulator is realized with 7 million Q, 0.03 dB/cm loss, 20 nW power consumption and 20 MHz 3-dB bandwidth, is demonstrated to track a laser. © 2022 The Author(s)