Atmospheric Pressure Electron Detection Method for MEMS Electron Microscope

The article presents the results of a new method for electron detection at atmospheric pressure (APED). This method is developed for a MEMS (Micro-Electro-Mechanical System) electron microscope to obtain images of a sample placed on a silicon nitride membrane in air. The electron beam is transmitted through the membrane and, under specific conditions, can reach the detector despite the presence of air molecules. The experiments were carried out on a miniature electron optical microcolumn model consisting of an octupole deflector, an anode with a Si
₃
N
₄
membrane, and an electron collector. The anode, glass spacer, and electron collector formed a microchamber that was filled with air. Measurements were made using an electron beam from JEOL Scanning Electron Microscope (SEM). The first images obtained using the APED method and a quantitative description of the operation principle are presented.