Modified Model of Squeeze Film Gas Damping of Circular Plate

Squeeze film damping is an important damping mechanism in MEMS resonators. Considering the end effect of MEMS squeeze film structure, Veijola modified the squeeze film damping model of Reynolds equation, and proposed a modified model for rectangular plates, but Veijola did not give a modified model of squeeze film damping of circular plate. In this paper, based on Vejiola's theory, the calculated size is corrected for the squeeze film of the circular plate, and establish a circular plate squeeze film damping modified model, which is verified by numerical simulation. The research results show that the damping error between the modified model and the numerical model is very small, with a mean error less than 1 %, while the unmodified model has an error of more than 7%. This paper also discusses the influence of the size of the circular plate radius and gap height on the end effect. It is found that the larger the radius of the circular plates and the smaller the height of the gap, the smaller the influence of the end effect on the squeeze film damping.