Modeling of a Clamping-based Piezo Actuator in Triangular Configuration

The use of models to predict the behavior of drives in general and of piezo actuators with hysteresis in particular plays a major role during their entire product life cycle. Models can already be applied during development, e.g. for dynamics estimation, and provide insights into the state of the actuator during operation. For one type of piezo actuator, this paper presents a nonlinear switching model that reproduces a motion profile with micrometer accuracy. The model is not based on any restriction of the operating range. For parameterization, a particle swarm optimization based on measurement data available during normal operation is proposed, which allows parameter tracking at runtime.