High-Performance 300mm Integrated Superconducting Resonators for Quantum Computing Applications

We report on the electrical performance of integrated superconducting microwave resonators at millikelvin temperatures. The resonators were successfully integrated into a 300mm process to achieve tight material and process control. By careful substrate preparation, optimized growth conditions, patterning and postprocessing, we demonstrate record-high resonator quality factors, with a tight control of the resonance frequencies. We have successfully tested several ultra-low loss resonator materials based on elemental and compound superconductors and benchmarked their electrical performance. This work paves the way towards a robust development platform for superconducting qubit technologies.