A V-Band Nine-State CMOS-MEMS Phase Shifter MMIC

This paper presents a CMOS-MEMS tunable phase shifter. Instead of using two identical loadings which are commonly seen in reflection-type phase shifters, this topology only requires a single load, leading to smaller chip size and lower fabrication cost. In addition, the actuator-driven interdigital capacitance is designed to generate nine tuning states, providing more flexible phase tuning. The measurement results show that phase tuning range of ~80° is achieved over the entire band with excellent linearity.