Technology Opportunity Analysis of Lithographic Machine Based on Paper and Patent Keywords Comparison

Lithography machine is the core equipment of chip manufacturing. It has great significance for followers to catch up with and surpass the predecessor for the potential technology opportunities. Firstly, the TextRank algorithm is used to extract significant keywords from papers and patent texts, and the extracted keywords are taken as the theme of lithography technology development. The extracted high-frequency keywords were divided according to the time window, and the potential technical opportunities of lithography patent were analyzed according to the variation of the similarity between the paper theme and the patent theme over the past few years. We found the similarity of lithography paper and patent by analyzing the time distribution of the keywords. The research hot spot of the paper will arise four to five years earlier than the patent, which can better explore the technology opportunities in the field of lithography.