Non-Linear Sheath Oscillation Mechanism in Symmetric Capacitively Coupled Plasma Sheaths

Collisionless heating due to momentum transfer from the oscillating sheath is one of the key heating mechanism in capacitively coupled plasma (CCP). Multiple high frequency sheath oscillations are often observed even during a single sheath expansion phase, which could largely enhance the discharge
^1–3
. However, the non-linear dynamic behaviors are not yet understood adequately.