Non-Equilibrium Materials Processing using GHZ Split-Ring Resonator Microplasma Resonators

Previously, we have explored the effects of materials and fabrication methods on microwave, microplasma generation using split-ring resonators (SRRS)
¹
. The SRRs produce intense electric fields
$(> 10^{7}\ \mathrm{V}/\mathrm{m})$
, which gives them the ability to produce plasmas. By introducing materials into the gap of the split-ring resonator, it may be possible to not only further intensify the electric fields and therefore the plasma breakdown, but also to modify the material through intense electric fields and plasma exposure. Since the volume of the split-ring resonator gap is very small, the material in the gap will also have a relatively high volume to surface area ratio. Therefore, it may be possible to modify such materials with minimal thermal loading. This geometrical feature may allow for the processing of materials through electric fields and plasma exposure without associated thermal effects.