Highly uniform and reproducible 850 nm vertical-cavity surface-emitting lasers grown by MOCVD

850 nm vertical-cavity surface-emitting lasers (VCSELs) were grown by metalorganic chemical vapor deposition (MOCVD). High uniformity of the Fabry-Perot cavity wavelength for VCSEL materials of /spl plusmn/0.15 % across a 3-in diameter wafer was achieved. Also, /spl plusmn/0.1 % Al composition uniformity of Al/sub 0.98/Ga/sub 0.02/As was obtained.