Influence of Penning Ionization and Attachment Reaction Rates on Dielectric Barrier Discharge

In order to Figure out the role of Penning ionization and attachment reaction in changing atmospheric DBD characteristics, a one-dimension fluid model is built based on Ar/NH
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dielectric barrier discharge (DBD). The Penning ionization and attachment reaction rates are multiplied by different coefficient $\eta$ and $\xi$, respectively, to change corresponding reaction intensity. Plasma parameters are investigated, including breakdown threshold, electron temperature, cathode falling thickness, ionization efficiency of Ar/NH
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DBD, different particles density and evolution. Compared with attachment reaction, the absence of Penning ionization will have more remarkable influence on DBD characteristics.