Demonstration of Rectangular Waveguides by Microfabrication Technology

As the frequency goes up to the terahertz band, the dimensions of rectangular waveguide decrease, and the requirement of surface roughness increases, so advanced micromachining technology is employed to meet the requirements. This paper employed UV-LIGA (Ultraviolet-Lithography, electroplating and micro-molding) technology to microfabricate a terahertz rectangular waveguide with the standard internal cross-sectional dimension of a = 712 μm and b = 355μm, and the length of 25.4mm, operating at the frequency ranging from 280GHz to 400GHz. Microfabricated rectangular waveguide, with cros-ssectional dimensions of a=710±1μm and b=355±2μm has been achieved. The measurement result showed that the S
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of the prototype was between -2.52dB and -8.15dB from 320 to 400 GHz.