Research on three dimensional measurement method based on focused evaluation

Focus Variation Microscopy is an important method for surface topography measurement. Focusing evaluation function, focusing evaluation window and focusing search algorithm are the main steps of focus variation microscopy, among which focusing evaluation function is the most important. In this paper, the research status and measurement principle of focus variation microscopy at home and abroad, the types of focusing evaluation function, focusing evaluation window and focusing search algorithm are introduced in detail. Finally, based on four different focusing evaluation operators, the three-dimensional morphology of the object is restored and certain effects are achieved. Of course, in the future research, the effect will be more obvious after the algorithm is improved.