A Defect-Based MEMS Phononic Crystal Slab Waveguide

Phononic Crystals are entering the Micro-Electro-Mechanical System (MEMS) world thanks to their ability to manipulate the elastic waves propagation. This work presents the first defect-based MEMS Phononic Crystal (PnC) slab waveguide, employed to couple a pair of MHz out-of-plane resonators. The prototype, fabricated in a conventional 24-µm-thick micromachining process and coupled to dedicated electronics, demonstrates the possibility to manipulate wave propagation properties and to efficiently couple distant MEMS resonators.