Tracing the Force-Displacement Characteristics of Non-Linear Microsystems by In-Situ Characterization

We present an integrable force sensing mechanism intended for simultaneous force and displacement measurements for visual in-situ characterization of surface MEMS. Based on two mechanical amplifiers, the presented mechanism combines independent force and displacement measurements without limiting the sensitivity of the other parameter. The working principle of the force sensor is demonstrated on typical non-linear microsystems such as buckling beams and vertical electrostatic actuators.