Excellent Scale Factor Performance for Whole-Angle Micro-Shell Resonator Gyroscope

This paper presents the excellent scale factor performance of the whole-angle micro-shell resonator gyroscope for the first time. As for the micro-scale resonator, the capacitive detection nonlinearity is obvious and it would result in the
$4\theta$
harmonic angle drift that has great effects on the scale-factor nonlinearity under whole-angle mode. A real-time calibration method based on the relationship of harmonic components of the detection signal is proposed to eliminate the
$4\theta$
harmonic angle drift. Besides, the scale-factor stability which is only influenced by the thermal expansion of the micro-shell resonator is also compensated by the resonant frequency. After the nonlinear calibration and temperature compensation, the scale-factor nonlinearity and stability have been improved by 14 and 9 times respectively to sub-ppm level and 11ppm over the whole temperature range, which has proved the excellent scale factor performance for the whole-angle gyroscope.