Designing Weakly Coupled Mems Resonators with Machine Learning-Based Method

We demonstrate a design scheme for weakly coupled resonators (WCRs) by integrating the supervised learning (SL) with the genetic algorithm (GA). In this work, three distinctive achievements have been accomplished: 1) the precise prediction of coupling characteristics of WCRs with an accuracy of 98.7% via SL; 2) the stepwise evolutionary optimization of WCR geometries while maintaining their geometric connectivity via GA; and 3) the highly efficient generation of WCR designs with a mean coupling factor down to 0.0056, which outperforms 98% of random designs. The coupling behavior analysis and prediction are validated with experimental data of coupled microcantilevers from a published work. As such, this newly proposed scheme could shed light upon the structural optimization methods for high-performance MEMS devices with high degree of design freedom.