Temperature Control and Improvement of Mocvd in 5G Chip Process Based on Quatre Algorithm

This paper adopts the conventional PID control which is widely used in industry as the basic research method and based on inherently safer design (ISD). Based on Quatre algorithm, the temperature control of 5G chip MOCVD, the principle of PID controller and two discrete PID control forms of position PID and incremental PID are studied. Taking the electric furnace as the research object, its object model is established. The PID control of the object is studied. The engineering tuning method of Z- N method, which is the most commonly used, is chosen as the comparative research object. When evaluating the control performance, several dynamic performance indexes and error performance indexes are studied, and the ITAE performance index is selected. Then, according to the characteristics of Quatre itself, a parallel communication strategy is proposed, and its performance is verified by comparing PSO and the original Quatre algorithm through function tests. The algorithm is introduced into PID controller to realize self-tuning based on PID control. The performance is verified by comparing Z-N tuning method with temperature control object simulation.